Chapter 275 Inspection
The 0.8-micron process lithography machine produced by the Microelectronics Center of the Chinese Academy of Sciences, its light source and photoelectric imaging system are both masterpieces of the Institute of Optoelectronics. As the top leader of the Institute of Optoelectronics, President Zhao is considered to be half an expert in lithography machines.
With just a glance, he recognized the origin of this set of lithography machines. In the first half of 1995, the Microelectronics Center completed the research and development of the 0.8-micron process lithography machine. The output was obvious, and there was not much produced in total. There was no way. As the boss of the Chinese Academy of Sciences, the Fantasy Group, which is most likely to develop in this field in China, has given up taking the technical route. Unless the country launched a large-scale integrated circuit project, no unit would be full and would purchase domestic lithography machines.
The market share of domestic lithography machines was not only in the 1990s, but also in the 21st century. Modu Microelectronics claimed that it achieved domestic production of 90nm lithography machines in 2009, but later domestic wafer factories would rather buy second-hand imported lines than domestic products.
On lithography machines, why can the magical rabbit create the law of cabbage but it doesn't work? This is not surprising, because one is that the core equipment is not mastered and Nikon is your neck. The other is that the yield rate of lithography machines cannot be improved, and no matter how cheap the products are, it cannot stand up to the production cost.
Of course, no matter what, Magic City Microelectronics has always made some achievements. Although Zhou Shuo felt sorry, he also understood that domestic lithography machines were not good, and it was not a problem for them.
In short, the photolithography machines that can be sold by the Microelectronics Center of the Chinese Academy of Sciences are rare these days, and the photoelectric equipment among them can be seen at a glance by President Zhao.
Regardless of the research results, it at least shows that Zhou Shuo is indeed investing in research technology. The look of President Zhao looking at his own products naturally became much gentler.
"This set of equipment was made by myself when I was in the optoelectronics office." Mayougong stood beside Dean Zhao and said with emotion: "The courtyard, no matter how good the level of the Panhan Research Institute is, at least they are really doing technology steadily. In this regard, they should not be too demanding on them."
"Hmph, you are someone else's worker now, so of course you are talking for the boss." Dean Zhao hummed with a bit arrogantly, but his eyes could not be moved away from the lithography machine.
He restrained his temper and asked curiously: "Is this your improved 0.5 micron process lithography machine? What improvements have been made?"
"We have improved..." Mayou made his head public, suddenly paused, and shook his head helplessly: "I signed a confidentiality agreement with the institute, and the specific technology cannot be mentioned."
"Virtue." Dean Zhao glanced at Ma Yougong. He felt uncomfortable all over. There was no way. His body itself was mostly taught by Dean Zhao. Now that the teacher asked him this question, he seemed to be a bit guilty.
However, Dean Zhao did not make much trouble, but just turned around in front of the lithography machine, so he didn't believe that his eyesight could not tell the difference.
In fact, although Mayougong is somewhat rebellious, Dean Zhao doesn't blame him much in his heart. First, over the years, the Optoelectronics Institute has indeed felt a little sorry for Mayougong. Second, I also hope that his apprentice can have a good home.
From this perspective, he actually understands Mayougong's approach to confidentiality. If the improvement of technology is really effective, it involves hundreds of millions of money. Fanhan Research Institute is a private company, so of course it is impossible for people to open it up.
At this moment, the indicator light in front of the lithography machine suddenly changed from red to green, and a short "beep" sound was made.
A 200mm diameter wafer disk was steadily sent out from the lithography machine by a robotic arm.
"This is!" Dean Zhao didn't know what happened. The wafer spit out from the lithography machine looked no different on the surface, but he knew that this was a disk that had been lithographically employed.
At this time, part of the photoresist on this disc should have been evaporated. As long as the disc is sent to the etching machine, the integrated circuit can be etched according to the photolithography path.
Everyone present, except for the security personnel of the security department, almost everyone has something to do with the lithography machine system. Naturally, they all understand whether the Panhan Research Institute has mastered the 0.5 micron process, and the answer is at this moment.
"Everyone, whether our Panhan Research Institute has mastered the 0.5 micron process technology, you can wait and see at this moment! This single crystal silicon wafer is our first lithography after the transformation. I ask you to remember this glorious day on October 7, 1995..."
Zhou Shuo was almost devout, transferring the wafer from the lithography machine to the etching machine, and started the etching process without hesitation.
But at this moment, it seemed that everyone had forgotten their original intention. They just looked at the thin single crystal silicon wafer with all their attention, but they were already a little convinced that Fanhan Research Institute had implemented the 0.5 micron process.
The question is very simple. If it weren't for being fully confident, how could Zhou Shuo have the courage to complete the etching process in front of everyone? Some people even have a small plan in their minds. According to domestic traditions, this trick that they played after having a successful experience is released.
No matter what, Zhou Shuo's confident appearance made their attitude change unconsciously.
Compared with lithography programs, the etching speed is much faster. After a few minutes, the acid solution has corroded the area without photoresist to a micro mark with only zero points and a few microns. It is so small that no one can detect it by the naked eye or an ordinary magnifying glass.
Of course, with the equipment in the honeycomb laboratory, there are a lot of ways to observe and measure it.
At least at the level of integrated circuit manufacturing in 1995, a line width of 0.5 microns is enough, and enough, an optical microscope is enough.
President Zhao glanced at his proud disciple Ma Yougong and sighed slightly. He stood up and reported to himself, "Mr. Zhou, I'll measure this wafer, right?"
Zhou Shuo smiled and solemnly handed the wafer to Dean Zhao, nodded and said, "It is an honor for the Panhan Research Institute to be able to measure it by Dean Zhao himself. I think no one here has more credibility than Dean Zhao."
President Zhao carefully picked up the wafer and shook his head and said, "Who knows if you put the wafers you got from other places in advance? According to my words, you should at least put another wafer in front of all of us."
He paused and sneered: "The farce of water turning into oil was popular in society a few years ago. When it comes to such exaggerated science and technology, magicians have always been more capable than scientists."
Zhou Shuo looked at Dean Zhao with a smile, shook his head and said, "Director Zhao will know if this wafer was produced by our Panhan Research Institute at a glance."
President Zhao refused to argue. He said that these two sentences were questioning, but rather said that he was expressing his position. After all, this technology was participated by Ma Yougong, and he still had confidence in the disciples he had trained himself. He knew in his heart how Ma Yougong's academic ethics was. No matter how difficult life was, academic fraud would definitely not fall on him.
Dean Zhao looked around and found an optical microscope easily. This is a high-power microscope, with a maximum observation resolution of 0.1 micron level. It is a breeze to observe an integrated circuit that is 0.5 micron line width.
He skillfully operated the experimental instruments and soon prepared the preparations. Director Zhao looked into the microscope, but he didn't expect to shout out in surprise!
"Ah!" Dean Zhao actually took a step back from the front of the laboratory bench, and it seemed like he had seen a ghost.
Dean Zhao quickly realized his disobedience, but he had no time to explain to everyone, so he hurriedly rushed towards the microscope.
After more than ten minutes, he raised his head from the microscope and murmured to himself: "It's really true, it's really..."
"Old Zhao, what's true or false? What did you see?" An anxious leader asked beside Dean Zhao, holding his clothes.
"It is indeed 0.5 micron line width!" President Zhao said with some bitterness, but a little proud.
Yes, although he lost the bet, he was still proud. Because this was a miracle created by the Chinese and a miracle that his proud disciples participated in. As an old scientist who has devoted his life to the scientific cause of the Republic, he still has a glory even though he lost.
"That doesn't mean anything, maybe they've done it. Mr. Zhao, you believe in the statement of putting satellites in one month? There must be some tricks, you have to keep your eyes open!"
"Go! Go and see it yourself!" President Zhao straightened his back and pointed to the microscope and said, "Chinese, we Chinese have always been a nation that is good at creating miracles!"
The person beside him stood in front of the microscope with a look of obvious suspicion, and immediately took a big step back with a "ah"!
"What's going on? What's going on?"
Everyone was confused, and it would be fine if President Zhao was shocked alone. Why did the person behind him still act so unbearable when he was mentally prepared?
"Really! It's true!" After reading this, this man was a little lost and muttered.
"What's going on? I'll take a look!"
"ah!"
"Oh, let me see!"
"Oh! Really!"
Almost everyone behind him couldn't help but feel surprised when they saw the pattern under the microscope.
Zhou Shuo laughed and stopped the noise from the people behind him. Through the equipment, the pattern observed by the microscope was directly displayed on the projection screen of the laboratory.
Chapter completed!